A probe (28), as used in a scanning neutral helium microscope, for detecting neutral particles originating from a beam (20) of neutral particles directed at a target location (21) of a sample (22) and subsequently scattered at the target location (21) is disclosed. The probe (28) has a direction filter (32), such a microplate shutter having a plurality of microchannels (58), that is adapted to allow passage through the direction filter (32) for particles travelling in a direction from the target location (21) to a filter area (46) of the direction filter (32). The probe further has an neutral particle detector (40) that detects the particles that has passed through the direction filter (32).
展开▼
