METHOD FOR FABRICATING SINGLE-CRYSTALLINE NIOBIUM OXYNITRIDE FILM AND METHOD FOR GENERATING HYDROGEN USING SINGLE-CRYSTALLINE NIOBIUM OXYNITRIDE FILM

摘要

The present invention provides a method for fabricating a single-crystalline niobium oxynitride film suitable for a hydrogen generation device. The present invention provides a method for fabricating a single-crystalline niobium oxynitride film formed of a niobium oxynitride represented by the chemical formula NbON; the method comprising: (a) epitaxially growing the single-crystalline niobium oxynitride film on one substrate selected from the group consisting of a yttria-stabilized zirconia substrate, a titanium oxide substrate, and a yttrium-aluminum complex oxide substrate.