PURGE DEVICE, PURGE STOCKER, AND PURGE ABNORMALITY DETECTION METHOD

摘要

[Problem] To provide a purge device with which the increase of the number of sensors to be used for the purpose of detecting purge abnormality can be suppressed. [Solution] Provided is a purge device (4) that is equipped with: a flow rate control device 32 that controls the flow rate of a purge gas in piping 34 connected to a container F; and a determining unit 33 that determines whether purging with respect to the container F is acceptable or not on the basis of an output signal of the flow rate control device 32.