首页> 外国专利> MULTI-PHOTONIC ANNEALING AND SINTERING OF SEMICONDUCTOR OXIDE USING INTENSE PULSED WHITE LIGHT, NEAR INFRARED RAY AND DEEP ULTRAVIOLET

MULTI-PHOTONIC ANNEALING AND SINTERING OF SEMICONDUCTOR OXIDE USING INTENSE PULSED WHITE LIGHT, NEAR INFRARED RAY AND DEEP ULTRAVIOLET

机译:强脉冲白光,近红外和深紫外光的多光子退火和氧化物氧化物烧结

摘要

The present invention relates to a method for light sintering a semiconductor oxide ink by a complex light source using intense pulsed light, a near infrared ray and a far ultraviolet ray, the method being capable of annealing and sintering a semiconductor oxide ink for complex light sintering, selectively or for a large area, at room temperature and under atmospheric conditions for a short time of 1 to 100 ms, the semiconductor oxide ink for complex light sintering comprising: a semiconductor oxide selected from strontium titanium oxide (SrTiO_3), barium titanium oxide (BaTiO_3) or a mixture thereof; and a dispersion stabilizer.
机译:本发明涉及一种利用强脉冲光,近红外线和远紫外线通过复合光源对半导体氧化物油墨进行光烧结的方法,该方法能够对用于复合光烧结的半导体氧化物油墨进行退火和烧结。在室温和大气压下于1至100 ms的短时间内选择性地或大面积地使用,用于复合光烧结的半导体氧化物油墨包括:选自锶钛氧化物(SrTiO_3),钡钛氧化物的半导体氧化物(BaTiO_3)或其混合物;和分散稳定剂。

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