WAVELENGTH-TUNABLE VERTICAL CAVITY SURFACE EMITTING LASER FOR SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY SYSTEM

摘要

micro electro-mechanical system (MEMS) technology in use through the wavelength-tunable vertical-cavity surface-emitting laser (VCSEL) is an optical coherent tomography (OCT) for a swap (swept) source It is provided as. The wavelength tunable VCSEL includes a movable MEMS tunable top mirror by the lower mirror, the active region, and the static deflection of the VCSEL. The active region comprises a number of stacks of the lower mirror and a GaAs based quantum dot (QD) layer including a Bragg (Bragg) reflector (DBR) stack of GaAs-based distribution is frozen during the epitaxial growth on a GaAs substrate. MEMS tunable upper mirror comprises a mirror comprising a top membrane portion and a dielectric DBR stack is supported by the suspension beams. MEMS tunable quantum dots s VCSEL is to cover a wide operating wavelength range than 100nm, preferably, it can cover the operating wavelength range having a center wavelength of between 250 and 2950nm, and sweep rate (sweeping rate) is from hundreds of kHz kHz, and can be up to a few MHz. ;