MANUFACTURING METHOD FOR TFT-LCD ARRAY SUBSTRATE, LIQUID CRYSTAL PANEL AND LIQUID CRYSTAL DISPLAY

摘要

The present invention relates to a method of manufacturing a TFT-LCD display substrate, comprising the steps of: a) forming a gate electrode, a gate electrode insulating layer, an active layer composed of an amorphous silicon layer and an ohmic contact layer on a glass substrate, Forming a via hole on the drain electrode, the relaxed layer, and the relaxed layer located above the drain electrode; b) depositing a conductive thin film on the glass substrate after step a), applying photoresist on the conductive thin film, removing the photoresist other than the relaxed via-holes in the TFT region after exposure and development, Removing a portion of the photoresist forming the gap portion, and exposing a conductive thin film other than the via hole in the relaxed layer in the TFT region; c) removing the remaining photoresist through the fourth dry etching step to form the pixel region in step b) and exposing the conductive thin film to form a spacing portion of the pixel region; d) removing the exposed conductive film in steps b) and c) via a third wet etching; e) peeling the unremoved photoresist to form a conductive electrode, and connecting the conductive electrode to the relaxed layer via hole; . The present invention also provides a TFT-LCD display substrate and a liquid crystal display device manufactured by applying the above method.