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METHOD FOR MANUFACTURING TARGET TO BE DIRECTLY REUSED BY USING SPENT GOLD SPUTTERING TARGET THROUGH COLD SPRAY
METHOD FOR MANUFACTURING TARGET TO BE DIRECTLY REUSED BY USING SPENT GOLD SPUTTERING TARGET THROUGH COLD SPRAY
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机译:通过冷喷涂通过喷金溅射靶材制造可直接重复使用的靶材的方法
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摘要
The present invention relates to a method for manufacturing a target to be directly reused by using a spent gold (Au) sputtering target through a cold spray scheme. The method includes the steps of: S1) washing or cutting the surface of a spent Au sputtering target; S2) inputting the washed or cut spent Au sputtering target into a coil spray mold; S3) forming a densified coating layer on the spent Au sputtering target inputted into the mold by using raw powder cold spray; and S4) processing the surface of the coating layer. So, the manufacturing time and energy can be reduced.;COPYRIGHT KIPO 2016
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