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SURFACE PLASMONIC SENSOR USING SURFACE PLASMONIC SENSOR CHIP

机译:使用表面等离子芯片的表面等离子传感器

摘要

Provided is a surface plasmonic sensor using a surface plasmonic sensor chip. The surface plasmonic sensor using the surface plasmonic sensor chip comprises a surface plasmonic sensor chip including a silicon oxide thin film; a metal thin film arranged on an upper part of the silicon oxide thin film; a detection layer arranged on an upper part of the metal thin film; a gas transmission adhesive arranged on the upper part of the detection layer, and formed on a circumference of the detection layer excluding a center part; and a support substrate arranged on the upper part of the gas transmission adhesive. The surface plasmonic sensor chip is arranged on a side of an optical fiber having an exposed core by removing part of a clad. The optical fiber is fixated by a silica block such that a performance of the surface plasmonic sensor chip is able to be improved.;COPYRIGHT KIPO 2016
机译:提供一种使用表面等离子体传感器芯片的表面等离子体传感器。使用表面等离子体传感器芯片的表面等离子体传感器包括:表面等离子体传感器芯片,其包括氧化硅薄膜;在所述氧化硅薄膜的上部配置有金属薄膜。检测层设置在金属薄膜的上部;气体传输粘合剂布置在检测层的上部,并形成在检测层的除中心部分之外的圆周上;支撑基板设置在气体传输粘合剂的上部。通过移除部分包层,将表面等离子体传感器芯片布置在具有裸露纤芯的光纤的一侧。光纤通过硅胶块固定,从而可以提高表面等离子体传感器芯片的性能。; COPYRIGHT KIPO 2016

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