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DROPLET MATERIAL DISCHARGE DEVICE, COATING DEVICE PROVIDED WITH SAME LIQUID MATERIAL DISCHARGE DEVICE, AND COATING METHOD USING SAME COATING DEVICE
DROPLET MATERIAL DISCHARGE DEVICE, COATING DEVICE PROVIDED WITH SAME LIQUID MATERIAL DISCHARGE DEVICE, AND COATING METHOD USING SAME COATING DEVICE
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机译:液滴材料排出装置,具有相同的液体材料排出装置的涂布装置以及使用相同的涂布装置的涂布方法
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摘要
the plunger unit (20) having at least three plunger 21, the plunger unit 20, reciprocating plunger driving section 60 to move the three respective plunger 21 is inserted more than one metering hole (42), a discharge port 53 and the liquid material supply in communication with the metering hole (42) has a (45), the first position of the metering hole 42 and the liquid material supply in communication (45) and the metering hole 42 and the discharge port 53 to the first valve part driving unit 70 to switch the first position and the second position of the valve unit 40 and the valve unit (40) having a second position allowing communication, a plunger driving unit 60, the valve unit 40, and the valve driving unit 70 is disposed in the apparatus main body (2) maintaining provided, and the plunger unit (20) arranged around this, plunger 21 the plunger holder 31 which has a plunger holder 31, a plunger driving unit having a discharge device, such ejection apparatus capable of the interval and the number of the ejection opening as a variable according to detachably by being mounted, use the 60 application device and the same coating device to provide a coating method using. ;
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