METHOD FOR TESTING THE FUNCTIONALITY OF A YAW RATE SENSOR

摘要

The present invention relates to a method for testing the functionality of a yaw rate sensor. A yaw rate sensor comprises: a substrate; and a micromechanical structure capable of vibrating with respect to the substrate. The structure includes: a first driving element; a second driving element; and one or more coriolis elements, wherein the coriolis elements can be excited in one or more vibration modes by the first driving element and/or the second driving element. A detection signal is detected depending on the action of a force to be detected with respect to the coriolis elements, wherein the yaw rate sensor can selectively function in a normal mode or in a self-test mode and the first driving element and the second element are operated in the normal mode. In the self-test mode, selectively only the first driving element is operated or only the second driving element is operated.