LARGE AREA DOPING SYSTEM FOR SOLAR CELL BY USING ATMOSPHERIC PLASMA JET

摘要

Disclosed is a large area atmospheric plasma doping system for a solar cell. The large area atmospheric plasma doping system of the present invention includes: a power supply part generating and supplying a power source voltage and a ground voltage; a solar cell wafer; a tray which transports the solar cell wafer and receives the ground voltage; and a plasma source part which is injected with a gas from the outside, and stores the gas by distributing the gas uniformly, and generates atmospheric plasma jet by corona discharge by discharging the gas by an inline type while being applied with the power source voltage, and dopes the solar cell wafer linearly. The large area atmospheric plasma doping system of the present invention can improve production efficiency while reducing production costs, since the system can perform large area doping at high speed and at low costs.