MAGANESE TIN OXIDE TRANSPARENT CONDUCTING OXIDE AND TRANSPARENT CONDUCTIVE FILM USING THE SAME AND METHOD FOR FABRICATING TRANSPARENT CONDUCTIVE FILM

摘要

The present invention relates to a manganese tin oxide transparent conductive oxide (TCO), a multilayer transparent conductive film using the same, and a method for producing the same. The manganese tin oxide TCO is optimally composed by having a low surface roughness, low surface resistance, and high penetration rates even when being deposited at room temperature. The manganese tin oxide TCO according to the present invention has a composition, MnxSn1-xO (0x=0.055). The multilayer transparent conductive film according to the present invention comprises: a manganese tin oxide TCO having a composition, MnxSn1-xO(0x=0.055); a metal thin film laminated on the manganese tin oxide TCO; and another manganese tin oxide TCO laminated on the metal thin film and having a composition, MnxSn1-xO(0x=0.055).