Manganese tin oxide based transparent conducting oxide and transparent conductive film and method for fabricating transparent conductive film using the same

摘要

Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of Mn_xSn_1-xO (0x≦0.055), and the multilayer transparent conductive film includes: a manganese tin oxide-based transparent conducting oxide having a composition of Mn_xSn_1-xO (0x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of Mn_xSn_1-xO (0x≦0.055) deposited on the metal thin film.