RARE-EARTH THIN-FILM MAGNET, PROCESS FOR PRODUCING SAME, AND TARGET FOR FORMING RARE-EARTH THIN-FILM MAGNET

摘要

The present invention, Nd, Fe, and rare thin magnets a B as an essential ingredient, -Fe phase and Nd ₂ Fe ₁₄ made of a tissue alternately arranged in different three-dimensional B, each on the average crystal grain size of the rare earth magnetic thin film characterized in that the 10~30 . Mass production, excellent reproducibility, and a task is to provide a target for producing a thin-film rare-earth magnet and a production method and a relevant thin-film having good magnetic properties. ;