RARE-EARTH THIN-FILM MAGNET PROCESS FOR PRODUCING SAME AND TARGET FOR FORMING RARE-EARTH THIN-FILM MAGNET

摘要

according to the invention, Nd, Fe, b is a component of the thin film magnet, rare earth, u03b1 - Fe Nd2Fe14B. two of the three dimensional interaction of the open form of the average crystal particle diameter and 10 to 30 u339a is characteristic of the thin film of rare earth magnet.the production, excellent repeatability and good magnetic properties of the thin film with rare earth magnet and its manufacturing method, and production of the film in order to provide the target task.