OPTICAL INTEGRATED CIRCUIT, EMBEDDING MICROMIRROR FOR OPTICAL PATH SWITCH IN OPTICAL WAVEGUIDE, AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to an optical integrated circuit which comprises: an optical waveguide formed by sequentially stacking a substrate, a lower cladding layer on the surface of the substrate, a core layer, and an upper cladding layer surrounding the core layer; a storage groove formed around a longitudinal section of the optical waveguide by being etched downward from the upper cladding layer to a part or the whole of the lower cladding layer via the core layer in order to abstract light, emitted through the core layer of the optical waveguide, or input the light into the core layer; multiple adhesive pads formed at a distance from each other around the storage groove on the upper surface of the optical waveguide; a micromirror inserted into the storage groove to be attached, and including a slope surface, inclined at an angle of 30-60 to the surface of the substrate, to change an optical path to the upper part of the storage groove by reflecting the light, emitted from the core layer through the storage groove, or change the optical path to the core layer by reflecting the light moving downward from the upper part of the storage groove; and an active optical element attached through the adhesive pads, and emitting the light to the slope surface of the micromirror or receiving the light reflected from the micromirror. Therefore, the present invention is capable of easing its manufacture by manufacturing and installing the micromirror as a separate and independent structure, reducing an optical loss, caused by a defect of a mirror surface, by providing a good quality mirror surface, and reducing costs for the manufacture of an optical integrated circuit by manufacturing the micromirror with a variety of materials.;COPYRIGHT KIPO 2016