APPARATUS FOR MANUFACTURING GRAPHENE USING ROLL-TO-ROLL PROCESS AND MANUFACTURING APPARATUS USING SUBSTRATE SUPPLIED THROUGH ROLL-TO-ROLL PROCESS

摘要

The present invention relates to an apparatus for manufacturing graphene using a roll-to-roll process and a manufacturing apparatus using a substrate supplied through a roll-to-roll process. According to the present invention, the apparatus for manufacturing graphene using a roll-to-roll process comprises: a main chamber sealed against the outside and having at least one light transmission window; a supplying chamber provided at one side of the main chamber and having a supplying roll for supplying a catalytic substrate for preparing graphene to the inner part of the main chamber; a recovery chamber provided at the other side of the main chamber and having a recovery roll for recovering the catalytic substrate after passing through the inner part of the main chamber; a near infrared ray heating module installed at the outside of the light transmission window of the main chamber and emitting near infrared rays to the catalytic substrate passing through the inner part of the main chamber through the light transmission window, thereby heating the catalytic substrate; and a reaction gas supplying valve for supplying a reaction gas into the main chamber.;COPYRIGHT KIPO 2016