PLASMA GENERATING DEVICE PLASMA GENERATING METHOD AND METHOD FOR SUPPPRESSING OZONE GENERATION

摘要

the present invention has a pair provided with the dielectric film (21a, 22a) on at least one side of, and the opposite surface for the purpose of while still increasing the generation amount of active species suppress the amount of generation of ozone of the electrode (21 , 22), the electrode (voltage for plasma discharge by applying a pulse voltage between 21 and 22), applying means (4), and each of the electrodes (21, fluid distribution holes configured are respectively provided in places corresponding to the 22), to pass through a whole includes (21b, 22b), a plasma generator 100 is configured to have ion or a radical generated in contact with the plasma when the fluid circulation hole (21b, 22b) for fluid to pass through, means the voltage is applied ( 4) changes the peak value or pulse width or both of the pulse voltage applied between the electrodes (21, 22).