OPTICAL PATH CONVERTING UNIT FOR EXTRACTING HIGH RESOLUTION IMAGE, OPTICAL PATH CONVERTING MODULE, OPTICAL PATH CONVERTING METHOD, RECORDING MEDIUM STORING PROGRAM FOR EXECUTING METHOD THEREON, AND SEMICONDUCTOR SUBSTRATE PATTERN TEST DEVICE

摘要

An optical path converting unit for extracting a high resolution image according to an embodiment of the present invention is a unit which enables light emitted from an optical source to input on an image sensor through a fixed subject, and extracts a second image with a second resolution higher than a first resolution, based on a first image with the first resolution which is obtained by the inputted light. The optical path converting unit according to the present invention comprises: a main body (110); and an optical path converting unit (120) which is connected with the main body (110) to be moved in order to obtain different first images for extracting the second image and moves a path of the light incident on the image sensor by an amount smaller than a unit pixel of the image sensor at least two times, such that the subject is shifted to and imaged on an imaging surface of the image sensor.;COPYRIGHT KIPO 2016