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METHOD FOR REDUCING SIZE AND CENTER POSITIONING OF MAGNETIC MEMORY ELEMENT CONTACTS
METHOD FOR REDUCING SIZE AND CENTER POSITIONING OF MAGNETIC MEMORY ELEMENT CONTACTS
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机译:减小磁存储元件接触的尺寸和中心定位的方法
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摘要
how to position the contact in the center on the layer of the magnetic memory element. In one embodiment, a spacer formed in the opening surrounding the upper layer, and forming a contact in the spacer. To form a conformal layer of spacer from the anisotropic etching is deposited on the top surface and the opening. ;
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