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A method for manufacturing vertically aligned SnSe nanosheets via physical vapor deposition
A method for manufacturing vertically aligned SnSe nanosheets via physical vapor deposition
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机译:通过物理气相沉积制造垂直取向的SnSe纳米片的方法
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摘要
The present invention relates to a method for manufacturing a selenium tin nano-sheet capable of efficiently depositing selenium tin on a substrate. A method for producing a selenium tin nano-sheet according to the present invention includes: a vaporization step of heating selenium tin powder to vaporize selenium tin; and a step of applying physical vapor deposition of selenium tin on the substrate by supplying vaporized selenium tin to the substrate, And heating the substrate to 270 to 330 캜 in the deposition step.
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