首页> 外国专利> A method for manufacturing vertically aligned SnSe nanosheets via physical vapor deposition

A method for manufacturing vertically aligned SnSe nanosheets via physical vapor deposition

机译:通过物理气相沉积制造垂直取向的SnSe纳米片的方法

摘要

The present invention relates to a method for manufacturing a selenium tin nano-sheet capable of efficiently depositing selenium tin on a substrate. A method for producing a selenium tin nano-sheet according to the present invention includes: a vaporization step of heating selenium tin powder to vaporize selenium tin; and a step of applying physical vapor deposition of selenium tin on the substrate by supplying vaporized selenium tin to the substrate, And heating the substrate to 270 to 330 캜 in the deposition step.
机译:硒锡纳米片的制造方法技术领域本发明涉及一种能够在基板上有效地沉积硒锡的硒锡纳米片的制造方法。根据本发明的硒锡纳米片的制造方法包括:加热硒锡粉以汽化硒锡的汽化步骤;以及将硒锡粉末汽化的步骤。通过将汽化的硒锡供给到基板上来进行硒锡的物理气相沉积的步骤,以及在沉积步骤中将基板加热到270至330캜的步骤。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号