VARIABLE ION GUIDE AND ELECTRON CYCLOTRON RESONANCE ION SOURCE APPARATUS INCLUDING SAME

摘要

The variable ion guide includes a variable chamber configured to adjust a length in one direction; At least one guide electrode connected to the variable chamber so as to be positioned by adjusting the length of the variable chamber; And an extraction electrode connected to one end of the variable chamber. The variable ion guide may be used to constitute an electron cyclotron resonance (ECR) ion source device including a plasma chamber, a magnet portion, and a microwave generating portion together with the variable ion guide. According to the variable ion guide and the ECR ion source apparatus, by appropriately adjusting the shape of the electrode for ion extraction and the size and position of the hole formed in the electrode, it is possible to draw out a high-quality beam, have.