Process for recovering hexachlorodisilane from mixtures of chlorosilanes contained in process effluent streams

摘要

The invention relates to a process for recovering hexachlorodisilane from mixtures of chlorosilanes having the general formula SixHyCl2x + 2-y contained in process exhaust gas streams, where x = 1 and y = 0-3 and x = 2 and y = 0-5. The present invention is therefore based on the object to provide a method which is a separation of Hexachlordisilans with high yields from the chlorosilane mixtures described in the thermal reaction of hydrogen with monosilanes of the general formula SixHyCl2x + 2-y, where x is 1 and y equals 0-2, accumulates, allows. The object is achieved by a process for recovering hexachlorodisilane from mixtures of chlorosilanes with the general formula SixHyCl2x + 2-y contained in process exhaust gas streams, where x = 1 and y = 0-3 and x = 2 and y = 0-5 in that the exhaust gas streams or fractions thereof are converted into the liquid phase and thereafter the partially hydrogenated chlorodisilanes of the general formula SixHyCl2x + 2-y (x = 2, y = 1-5) present in the mixture of the chlorosilanes are additionally catalytically added be converted to hexachlorodisilane and separated from the resulting mixture hexachlorodisilane by distillation.