Laser triangulation sensor and measuring methods with a laser triangulation sensor

摘要

It is a device for measuring the distance of a workpiece, in particular a laser triangulation described in the direction of. The device comprises a source of coherent radiation for the illumination of the workpiece along an optical axis at a first angle relative to the surface of the workpiece, and an optical arrangement for the detection of scattered light produced by the illumination, wherein the optical arrangement of the scattered light is below a second angle relative to the surface of the workpiece is detected and wherein the second angle deviates from the first angle. The optical arrangement contains an at least in one dimension spatially resolving detector for positionally resolved detection of the scattered light and an interferometer comprising at least one movably arranged mirror, which in the optical arrangement in such a way is made available in the beam path of at least a part of the scattered light to be.