An optical system for homogenization of the intensity of laser radiation

摘要

An optical system (10) for the homogenization of the intensity of laser radiation, in particular for a plant for the processing of thin film layers, comprises a beam shaping means (12), which is adapted to a laser beam (14) to form in such a way that a beam profile (16, 36) of the laser beam (14) a long axis (y) and a short axis (x), a in the beam path of the laser beam (14) of the beam shaping means (12), which is arranged downstream of an imaging device (18), which is adapted to the thus shaped laser beam (14) as an illumination line (22), as well as a diaphragm device (30) with at least one diaphragm element (32, 32a, 32b), which in the beam path of the laser beam (14) in at least one side (34, 34a, 34b) of the radiation profile (16, 36) extending along the long axis (y) of the radiation profile (16, 36) extends, which projects in such a way that, by means of partial blanking of the beam profile (16, 36) the radiation profile (16, 36), a locally limited recess (38, 38a, 38b) on the at least one side (34, 34a, 34b) of the radiation profile (16, 36) comprises.