Apparatus and method for the generation and transmission of a charge - and masses separated ion beam variable energy

摘要

The invention relates to a device (1) for the generation and transmission of an ion beam (10a) with ions (6a) of an ion beam spectrum (10). The ion beam spectrum (10) consists of ions (6) with different states of charge and different masses. The apparatus (1) is provided with an ion source as well as an arrangement of optical elements for the deflection of charged particles, in particular at least one electrostatic lens and at least one deflector (14), on a common beam axis for extracting and deflecting the ions generated beam spectrum (10) is formed.The device has a yield missing element (15) for the charge state of - and mass separation of the extracted ions beam spectrum (10) and for generating an ion beam (10a) from ions (6a) with a predetermined charge - - mass ratio. The yield missing element (15) is configured in such a way, the ions (6a) according to the flight time - method for separating.In addition, the invention relates to the use of the apparatus (1) in a system for the treatment of a surface of a solid body (21) as well as a method for producing and emission of an ion beam (10a).