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METHOD AND DEVICE FOR CHARACTERIZING, USING ACTIVE PYROMETRY, A THIN-LAYER MATERIAL ARRANGED ON A SUBSTRATE

机译:活性磷光法表征基体上布置的薄层材料的方法和装置

摘要

The present invention relates to a method for characterizing a material using active pyrometry. The material comprises at least one thin surface layer arranged on a thick substrate. The present invention heats the surface (ZTH) of the material by exposing the material to high-frequency laser pulses, so as to perform a series of temperature increase/decrease thermal cycles, accompanied by a heat build-up from one cycle to the next. The present invention collects the emitted radiation, acquires and processes the signals measured by comparing the measured values to the theoretical values obtained by modelling, so as to obtain thermo-physical properties for characterizing the material. The present invention also relates to a device for implementing the method comprising a high-frequency pulsed laser used as heat source.
机译:本发明涉及一种使用活性高温法表征材料的方法。该材料包括布置在厚基板上的至少一个薄表面层。本发明通过将材料暴露于高频激光脉冲中来加热材料的表面(ZTH),以执行一系列温度升高/降低热循环,伴随着从一个循环到下一循环的热量累积。 。本发明收集发射的辐射,获取并处理通过将测量值与通过建模获得的理论值进行比较而测量的信号,从而获得用于表征材料的热物理性质。本发明还涉及一种用于实施该方法的设备,该设备包括用作热源的高频脉冲激光器。

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