Vacuum deposition apparatus with valve cells comprising a leakage detection device and method for detecting a leak in a vacuum deposition apparatus

摘要

A vacuum deposition apparatus (10) has a leak detection device (50) injection valve (53) in introducing helium in a bottle (52) in a vacuum deposition chamber (30). The leak detection device uses gas pump in pumping helium in the vacuum deposition chamber. A helium detector (51) delivers signal about helium flow rate through a detector input (51A). A pressure gauge (54) measures pressure inside the vacuum deposition chamber. A signal processor (55) processes signals delivered by the helium detector and vacuum gauge, and delivers signal about leak rate of inner tank valve (28). An independent claim is also included for a leak detection method in vacuum deposition apparatus.