MICROPUMP HAVING A FLOWMETER, AND METHOD FOR PRODUCING SAME

摘要

A micropump with a deformable membrane, including: a first chamber, one wall of which includes a first deformable membrane portion and an actuator of the first membrane portion; a second chamber including a second deformable membrane portion and a third chamber, including a third deformable membrane portion, the second chamber and the third chamber being connected together through a first channel, at least one of the second and third chambers being connected through a second channel to the first chamber; each of the second chamber and third chamber including a mechanism forming a detection gauge, but not including an activation mechanism.