MICROPUMP HAVING A FLOWMETER AND METHOD FOR PRODUCING SAME

摘要

The invention relates to a micropump having a deformable membrane comprising: a first chamber (15) one wall of which comprises a first deformable membrane portion and means (72 81 83) for actuating said first membrane portion; a second chamber (11) provided with a second deformable membrane portion (11 ); and a third chamber (13) provided with a third deformable membrane portion (13 ) the second chamber and the third chamber being connected to one another by a first channel (12) at least one of said chambers being connected to the first chamber (15) by a second channel (12 14) wherein both the second chamber (11) and the third chamber (13) comprise detection gauge means (R1 R4 R 1 R 4) respectively but are not provided with actuation means.