Inspection apparatus and method for sphero-chromatic aberration correction

摘要

A semiconductor inspection system and method are described. In an embodiment, the system includes an illumination system configured to transmit light at a given wavelength and an optical system configured to receive light from the illumination system and transmit light at the given wavelength to a surface. The optical system includes at least one lens (422) that is moveable (for example, a zoomable lens) to change the nominal wavelength of the semiconductor inspection system to correspond to the illumination wavelength of the illumination system so that the sphero-chromatic aberration of the semiconductor inspection system meets a user-defined tolerance.