COORDINATE MEASURING MACHINE (CMM) AND METHOD OF COMPENSATING ERRORS IN A CMM

摘要

The present invention relates to a coordinate measuring machine (1) comprising a stationary base (3), a probe head (6), at least one linear drive mechanism (2X,2Y,22) for moving in a first direction, the linear drive mechanism (2X,2Y,22) having a linear guide (4X,4Y) and a movable member (5X,5Y) being supported for movement along the guide by bearings (7 1 X,7 2 X,7 3 X,7 4 X,7 1 Y,7 2 Y,7 3 Y,7 4 Y). The linear drive mechanism (2X,2Y,22) further comprises at least one displacement sensor (9 1 X,9 2 X,9 3 X,9 4 X,9 5 X,9 1 Y,9 2 Y,9 3 Y,9 4 Y,9 5 Y) for measuring a distance from the movable member (5X,5Y) to the guide (4X,4Y) in a direction being non-parallel with respect to the first direction (X,Y,Z), wherein the sensed distance indicates a translational displacement of the movable member (5X,5Y) from an ordinary bearing position in a direction perpendicular to the first direction (X,Y,Z).