THERMIONIC EMISSION FILAMENT, QUADRUPOLE MASS SPECTROMETER AND RESIDUAL GAS ANALYZING METHOD

摘要

In order to provide a thermionic emission filament capable of ensuring a long life and improving an analysis accuracy of a mass spectrometer using the thermionic emission filament, in the thermionic emission filament (211) including a core member (211A) through which electric current flows and an electron emitting layer (211B) which is formed so as to cover a surface of the core member (211A), the electron emitting layer (211B) is configured to have denseness for substantial gas-tight integrity.