METHOD FOR SCANNING A SAMPLE BY MEANS OF X-RAY OPTICS AND AN APPARATUS FOR SCANNING A SAMPLE

摘要

The invention relates to a method (90) for scanning a sample (99) by means of x-ray optics (100) for irradiating the sample (99) with x-rays (107a), comprising the following steps: (a) displacing a measuring point (106), defined by an optical initial point (108) of the x-ray optics (100), in the sample (99) in a first scanning direction (92) by means of swiveling the x-ray optics (100) about a first swivel axis (336); (b) detecting radiation (107b) emanating from the sample (99) at at least two measuring points (106) along the first scanning direction (92); (c) combining measured values correlating with the detected radiation (107b) to form an overall scan. Moreover, the invention relates to an apparatus (96) for scanning a sample (99), comprising: x-ray optics (100) for irradiating a sample (99) with x-rays (107a); a goniometer mechanism (300) connected to the x-ray optics (100), wherein the goniometer mechanism (300) is configured to carry out a swiveling of the x-ray optics (100) about a first swivel axis (336); at least one actuator (117) which is embodied to actuate the goniometer mechanism (300); and a control device (97) which is embodied to carry out the method as claimed in one of the preceding claims.