METHOD FOR CALIBRATING PARTICLE COMPOSITE ANALYSIS DEVICE, AND PARTICLE COMPOSITE ANALYSIS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for calibrating a particle composite analysis device and the particle composite analysis device which, in the particle composite analysis device suitable for the multidirectional analysis of measurement object particles, makes it possible to carry out simply with high accuracy the calibration of a device to be periodically performed in order to maintain and improve device reliability.SOLUTION: This particle composite analysis device comprises a particle measurement device 10 and a particle component analysis device 20. Calibration particles whose number, size and component at least are known are introduced into the particle measurement device 10 and the particle component analysis device 20, and analysis of each is carried out, the sensitivity of the particle measurement device 10 being calibrated on the basis of the number and size of the calibration particles measured by the particle measurement device 10, the sensitivity of the particle component analysis device 20 being calibrated on the basis of the component amount of the calibration particles measured by the particle component analysis device 20. Furthermore, the irradiation axis to a capture medium 23 of the particles introduced into the particle component analysis device 20 is calibrated on the basis of the state of capture of the calibration particles to the capture medium 23 of the particle component analysis device 20.SELECTED DRAWING: Figure 1