DATA ACQUISITION INDICATION GENERATION PROGRAM, DATA ACQUISITION INDICATION GENERATION METHOD, AND DATA ACQUISITION INDICATION GENERATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a data acquisition indication generation program, a data acquisition indication generation method, and a data acquisition indication generation device with which it is possible to generate an operation indication by quasi-steady measurement in correlation to a required density.SOLUTION: The data acquisition indication generation device acquires required density information pertaining to the required density of measurement data in an area specified by a combination of a plurality of control parameters in conducting measurement of an apparatus to be measured that has a plurality of control parameters. The data acquisition indication generation device generates a plurality of change curves pertaining to each of the plurality of control parameters on the basis of the required density information. The data acquisition indication generation device generates a data acquisition indication in which a change of each control parameter corresponds to the plurality of change curves and a new measurement is performed in a sequence where only one of the plurality of control parameters changes from the previous measurement.SELECTED DRAWING: Figure 8