LITHIUM COBALTATE SINTERED COMPACT, SPUTTERING TARGET MANUFACTURED USING SAID SINTERED COMPACT, METHOD FOR PRODUCING LITHIUM COBALTATE SINTERED COMPACT, AND THIN FILM MADE OF LITHIUM COBALTATE

摘要

PROBLEM TO BE SOLVED: To provide a sputtering target that has a high strength and allows a stable sputtering, and a production method and thin film thereof.SOLUTION: The method for producing a sintered compact includes: spray drying a lithium cobaltate slurry to manufacture a granulated powder having an average particle size of 20 to 150 μm; cold pressing and/or CIP molding the granulated powder; and sintering the obtained molded compact in an atmosphere containing oxygen by 99 vol% or more at 1000 to 1100°C for 20 hours or more and 40 hours or less, to produce a sintered compact having a flexural strength of 100 MPa or more and an average value of bulk resistance of 100 Ω-cm or less.SELECTED DRAWING: None