LASER DISPLACEMENT MEASUREMENT DEVICE AND LASER DISPLACEMENT MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser displacement measurement device with which it is possible to suppress the effect of speckles and improve the accuracy of measurement.;SOLUTION: A laser beam S is radiated to a measurement plane T while changing its phase randomly by phase modulation means 7, and the center of gravity position of a reflected light R that is reflected at the measurement plane T is detected by a position detection element 11. The detected center of gravity positions are averaged by center of gravity position averaging means 13. The center of gravity positions are brought closer to normal distribution by the averaging and abnormal amplitudes are reduced, so that the effect of speckles is reduced and the accuracy of measurement is improved.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2017,JPO&INPIT