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NOZZLE CLEANING DEVICE, COATING APPLICATOR, NOZZLE CLEANING METHOD, AND COATING METHOD

机译:喷嘴清洁装置,涂覆器,喷嘴清洁方法和涂覆方法

摘要

PROBLEM TO BE SOLVED: To provide a nozzle cleaning device which prevents mist etc. from adhering to a portion that affects coating performance of a processed body when a member related to wiping of a slit nozzle is cleaned, and to provide a coating applicator, a nozzle cleaning method, and a coating method.SOLUTION: In a nozzle cleaning device, a sealed space L1 is formed and cleaning of a wiping member 41 which wipes to remove deposits 100 of a slit nozzle 30 is conducted in the sealed space L1. Further, a discharge port 491 which discharges vapor-liquid in the sealed space L1 to the outside of the device is provided in the sealed space L1. Thus, a two fluid cleaning liquid WL used for cleaning the wiping member 41 and mist generated by the cleaning are discharged to the outside of the device from the discharge port 491 and do not adhere to an exterior part of the sealed space L1 of a device interior part.SELECTED DRAWING: Figure 12
机译:解决的问题:提供一种喷嘴清洁装置,其在清洗与狭缝喷嘴的擦拭有关的部件时,防止雾等附着在影响被加工物的涂覆性能的部分上,并且提供一种涂覆器,解决方案:在喷嘴清洁装置中,形成密封空间L1,并在密封空间L1中进行清洁以擦拭以去除狭缝喷嘴30的沉积物100的擦拭构件41。此外,在密闭空间L1中设有将密闭空间L1内的气液向装置外部排出的排出口491。因此,用于清洁擦拭部件41的两种流体清洁液WL和由清洁产生的雾从排出口491排出到设备外部,并且不粘附到设备的密封空间L1的外部。内部零件。选定的图纸:图12

著录项

  • 公开/公告号JP2017170445A

    专利类型

  • 公开/公告日2017-09-28

    原文格式PDF

  • 申请/专利权人 SCREEN HOLDINGS CO LTD;

    申请/专利号JP20170122239

  • 申请日2017-06-22

  • 分类号B05C11/10;B05C5/02;B05D3/12;B05D1/02;B05D3/10;B05D3;

  • 国家 JP

  • 入库时间 2022-08-21 14:01:08

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