首页> 外国专利> ROTARY X-RAY EMISSION TARGET FOR GENERATING X-RAY EMISSION UNDER ELECTRON BEAM IRRADIATION AND X-RAY GUN

ROTARY X-RAY EMISSION TARGET FOR GENERATING X-RAY EMISSION UNDER ELECTRON BEAM IRRADIATION AND X-RAY GUN

机译:在电子束辐照和X射线枪下产生X射线发射的旋转X射线发射目标

摘要

PROBLEM TO BE SOLVED: To provide a high-voltage generator for an X-ray source, an X-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an X-ray source, a rotary X-ray emission target, and an X-ray source.SOLUTION: A high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. An electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. A rotary vacuum seal includes a chamber capable of being exhausted at a position between a high vacuum pressure end and a low vacuum pressure end of a bore for a rotating shaft. A rotary target assembly is configured such that when a torque between a bearing housing and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing.SELECTED DRAWING: Figure 2
机译:解决的问题:提供用于X射线源的高压发生器,X射线枪,电子束设备,旋转真空密封件,X射线源的靶组件,旋转X射线解决方案:高压发生器包括屏蔽电极,该屏蔽电极电连接在第一电压倍增器和第二电压倍增器的中间。电子束设备包括控制光电探测器和在其间布置有透明导电屏蔽的光电发射器。旋转真空密封件包括能够在用于旋转轴的孔的高真空压力端与低真空压力端之间的位置处排出的腔室。旋转目标组件的配置使得当轴承箱和真空箱之间的扭矩超过预定扭矩时,轴承箱将相对于真空箱旋转。图2

著录项

  • 公开/公告号JP2017022123A

    专利类型

  • 公开/公告日2017-01-26

    原文格式PDF

  • 申请/专利权人 NIKON METROLOGY NV;

    申请/专利号JP20160161105

  • 发明设计人 ROGER HADLAND;

    申请日2016-08-19

  • 分类号H01J35/10;

  • 国家 JP

  • 入库时间 2022-08-21 14:00:59

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