CONTROL CIRCUIT OF PIEZOELECTRIC DRIVE DEVICE, PIEZOELECTRIC DRIVE DEVICE, ULTRASONIC MOTOR, ROBOT, HAND, AND PUMP

摘要

PROBLEM TO BE SOLVED: To detect a state of multiple piezoelectric elements which are connected in parallel.SOLUTION: A control circuit 330 of a piezoelectric drive device of the invention includes: a signal generation part 360 which inputs a state inspection signal to multiple piezoelectric elements connected in parallel; and a state detection part 380 which detects a state of the multiple piezoelectric elements on the basis of a state detection signal generated by the multiple piezoelectric elements according to the state inspection signal.SELECTED DRAWING: Figure 1