CONTROL CIRCUIT OF PIEZOELECTRIC DRIVING DEVICE, PIEZOELECTRIC DRIVING DEVICE, ULTRASONIC MOTOR, ROBOT, HAND, AND PUMP

摘要

A control circuit of a piezoelectric driving device includes: a signal generation unit that inputs a state inspection signal to a plurality of piezoelectric elements connected to each other in parallel; and a state detection unit that detects a state of the plurality of piezoelectric elements based on a state detection signal generated from the plurality of piezoelectric elements in accordance with the state inspection signal.