MANUFACTURING METHOD OF OPTICAL FUNCTIONAL FILM, MANUFACTURING METHOD OF SPATIAL OPTICAL MODULATION ELEMENT, OPTICAL FUNCTIONAL FILM, AND SPATIAL OPTICAL MODULATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an optical functional film that suppresses a reduction in accuracy of a fine structure.SOLUTION: There is provided a manufacturing method of an optical functional film including: a first step S202 of forming through holes 210a in a light receiving part 210 formed on a substrate P and forming a gap part 212 on the periphery of the light receiving part 210; and a second step S204 of performing thermal oxidation treatment of heating the substrate P after the first step S202.SELECTED DRAWING: Figure 8