CAPILLARY CONVEYANCE DEVICE, CAPILLARY ATTACHMENT DEVICE, CAPILLARY EXCHANGE DEVICE, CAPILLARY CONVEYANCE METHOD, CAPILLARY ATTACHMENT METHOD AND CAPILLARY EXCHANGE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a capillary conveyance device capable of inserting a capillary into an attachment portion of an ultrasonic horn without using a human hand.;SOLUTION: The capillary conveyance device includes: a first pipe 17 for carrying a capillary 13; an ultrasonic horn 11 having a mounting portion to which the capillary is attached; a first moving mechanism for relatively moving the ultrasonic horn and a first end portion 17a of the first pipe; and a mechanism for blowing gas to a second end portion 17b of the first pipe.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2017,JPO&INPIT