LAYERED REFLECTIVE ELECTRODE FILM, LAYERED REFLECTIVE ELECTRODE PATTERN, AND METHOD FOR MANUFACTURING LAYERED REFLECTIVE ELECTRODE PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a layered reflective electrode film which is high in reflectance in a visible-light region, especially a blue-color region, and low in resistance value, and on which a fine electrode pattern can be formed by etching readily.SOLUTION: A layered reflective electrode film comprises: an Ag film made of Ag or an Ag alloy; and a transparent conductive oxide film disposed on the Ag film. The transparent conductive oxide film is made of an oxide including Zn and Ga and further one or more kinds of Sn, Y and Ti. The atomic percentages of all the metal elements included in the transparent conductive oxide film are preferably as follows: 0.5-30.0 atom% for Ga; 0.1-10.0 atom% for each of Sn, Y and Ti; and the balance for Zn.SELECTED DRAWING: Figure 1