POROUS ELECTRODE, MANUFACTURING METHOD FOR THE SAME, AND HUMIDITY SENSOR USING POROUS ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a porous electrode the size and formation range of whose penetrating part can be controlled.SOLUTION: An upper electrode 4, consisting of a porous electrode, of a humidity sensor 1 heats over a glass substrate 2 heated base material deposited in the order of a lower electrode 3 and a humidity-sensitive polymeric membrane 5 at an aggregation temperature, and in this heated state subjects low melting point metal LM to physical vapor deposition over the surface of the humidity-sensitive polymeric membrane 5. Then, after the heated base material over which the low melting point metal LM is vapor-deposited to be returned to normal temperature and the electrode material EM is subjected to physical vapor deposition, the low melting point metal LM is obtained by etching this metal alone.SELECTED DRAWING: Figure 2