EVOLVED GAS ANALYSIS METHOD AND EVOLVED GAS ANALYSIS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an evolved gas analysis method and device which can simply correct a machine difference in detection sensitivity and daily variations, etc., and quantitate a measurement object with high accuracy.SOLUTION: Provided is a method for calibrating an evolved gas analysis device equipped with a sample holder, a heating unit for heating a sample and generating a gas component, an ion source for ionizing the gas component and generating ions, a mass spectrometer for analyzing the ions and detecting a gas component, and a gas passage in which a mixed gas of the gas component with a carrier gas for guiding the gas component to the mass spectrometer flows, wherein the method includes: a discharge flow rate adjustment step for adjusting a discharge flow rate of the mixed gas in a branch path to the outside; a sample holder cooling step for bringing the sample holder into contact with a cooling unit and cooling the sample holder; and a correction step for using a standard sample that contains the gas component as a measurement object, to (1) calibrate a spectral position in a mass spectrum, (2) calculate a sensitivity correction coefficient Cs=Ss/S, and (3) calculate a heating correction coefficient H=t/ts for correcting a heating speed of the sample in the heating unit when measuring the gas component of the actual sample.SELECTED DRAWING: Figure 10