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FLATNESS MEASURING APPARATUS

机译:平面度测量仪

摘要

PROBLEM TO BE SOLVED: To provide a flatness measuring apparatus capable of detecting an inclination amount of a rotational axis of a spindle when the rotational axis of the spindle is inclined at the time of measurement, and improving measuring accuracy, based on the detected inclination amount of the rotational axis of the spindle.;SOLUTION: In a flatness measuring apparatus 10, a displacement amount D1 from a reference value of a spindle 20 detected by a first sensor 56 is subtracted from a displacement amount D2 from the reference value of the spindle 20 detected by a second sensor 58, and this displacement amount subtraction value is divided by a distance subtraction value obtained by subtracting a position R1 from a position R2. This allows an arithmetic processing part 46 to detect an inclination amount B. The arithmetic processing part 46 calculates the flatness of a workpiece 14 based on the detected inclination amount B and a displacement amount C of a probe 30 detected by a detector 32.;SELECTED DRAWING: Figure 2;COPYRIGHT: (C)2017,JPO&INPIT
机译:解决的问题:提供一种平坦度测量设备,其能够在测量时检测主轴的旋转轴倾斜时检测主轴的旋转轴的倾斜量,并基于检测到的倾斜量来提高测量精度。解决方案:在平面度测量设备10中,从第一传感器56检测到的主轴20的参考值的位移量D1减去主轴的参考值的位移量D2。通过第二传感器58检测到图20所示的位置,该位移量相减值除以通过从位置R2减去位置R1而获得的距离相减值。这允许算术处理部分46检测倾斜量B。算术处理部分46基于检测到的倾斜量B和由检测器32检测到的探针30的位移量C来计算工件14的平坦度。图:图2;版权:(C)2017,JPO&INPIT

著录项

  • 公开/公告号JP2017156256A

    专利类型

  • 公开/公告日2017-09-07

    原文格式PDF

  • 申请/专利权人 TOKYO SEIMITSU CO LTD;

    申请/专利号JP20160040637

  • 发明设计人 TAKANASHI RYO;

    申请日2016-03-03

  • 分类号G01B5/28;G01B21/30;

  • 国家 JP

  • 入库时间 2022-08-21 13:58:20

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