Valve for negative pressure handling device or negative pressure clamping device, and negative pressure handling device

摘要

A valve housing (22) having a negative pressure supply side (28) and an adsorption side (30); a flexible separation wall (34) separating a control chamber (36) communicating with the negative pressure supply side within the valve housing; In a valve having a valve body (38) arranged on a flexible separation wall that is movable between an open position and a closed position, the valve body seals the negative pressure supply side against the suction side when in the closed position. It has a sealing area (44) that contacts the sealing sheet (64) to stop, and the volume of the control chamber is reduced while deforming the flexible separation wall depending on the negative pressure generated in the control chamber. At that time, the valve body moves from the open position to the closed position. At this time, the valve body has a suction side passageway (54) for fluidly connecting the control chamber to the suction side, and the sealing area and the seal sheet have fluid connection through the suction side passageway when in the closed position. It is arranged so as to be sealed. The sealing area is arranged outside the control room.