SCANNING PROBE MICROSCOPE, METHOD FOR ADJUSTING MEASUREMENT RANGE OF SCANNING PROBE MICROSCOPE, AND MEASUREMENT RANGE ADJUSTMENT PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope with which it is possible to correct a drift and acquire measured data with high accuracy even when an ambient temperature, etc., changes and a signal drifts during measurement.;SOLUTION: Provided is a scanning probe microscope 200, having a displacement detector 5 that detects a signal indicating the displacement of a cantilever 1, which scans with a probe 99 and acquires measured data while maintaining a prescribed physical quantity between the cantilever and the surface of a sample 300 at a constant level. The scanning probe microscope further includes: measurement range calculation means 40 for calculating a measurement width=(maximum value-minimum value) and an offset value=(measurement width/2)+minimum value from the maximum value and minimum value of a signal when a prescan that involves rough scanning with the probe is performed before obtaining measured data; calculated data correction means 40 for correcting the offset value and/or the measurement width on the basis of the amount of a change with time of the signal at the same position on the sample surface when the prescan is performed; and measured data acquisition means 7 for acquiring measured data on the basis of the signal.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2017,JPO&INPIT